Valentin Fonck, Mohammadali Razeghi, Jean Spiece, Phillip Dobson, Jonathan Weaver, George Ridgard , Grayson Noah and Pascal GehringCharacterization of Heat Transfer in 3-D CMOS Structures Using Sideband Scanning Thermal Wave MicroscopyUniversité Catholique de Louvain, Louvain-la-Neuve, BelgiumIEEE XploreLink to paperRelated ApplicationsScanning Probe Microscopy (SPM)Related ProductsDétection synchrone 50 MHzAM/FM Modulation OptionMulti-Frequency OptionBack to Publications