J. Giner, Y. Zhang, T. Shiota, D. Maeda, K. Ono, S. Kajiyama, T. Oshima, T. Yamawaki, T. Sekiguchi
A concentrated springs architecture for single-digit frequency symmetry in Si MEMS gyroscope
IEEE Sensors, Oct. 30 - Nov. 3, 2016, Orlando, Florida, USA