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544 Documents available

Publications

M. van Es, A. Mohtashami, D. Piras, H. Sadeghian

Image-based overlay and alignment metrology through optically opaque media with sub-surface probe microscopy

Metrology, Inspection, and Process Control for Microlithography XXXII, online ahead of print March 13, 2018

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M. Tamer, M. van der Lans, H. Sadeghian

Image-based overlay measurement using subsurface ultrasonic resonance force microscopy

Metrology, Inspection, and Process Control for Microlithography XXXII, online ahead of print March 13, 2018

P. Fimpel, C. Riek, L. Ebner, A. Leitenstorfer, D. Brida, and A. Zumbusch

Boxcar detection for high-frequency modulation in stimulated Raman scattering microscopy

Applied Physics Letters, Vol. 112, Issue 16, (2018)

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