Session 2: Time-Resolved SPM Methods
14:30 - 16:00 CEST
Register for Session 2
Talk: V. Aubriet, Photo-sensitive Kelvin probe force microscopy for embedded silicon-oxide interface characterization
Characterization of interfaces is essential for several types of devices such as light-emitting diodes, solar cells, photodetectors, and transistors. In the case of photodetectors, it is important to characterize such interfaces to probe the impact of passivation, where defects present in the interfaces impact the dark current of the photodetector. Moreover, parameters such as surface photovoltage or minority carrier lifetime can reflect the influence of defects on these parameters even when embedded.
For this purpose, we use heterodyne Kelvin Probe Force Microscopy (h-KPFM) under modulated illumination to characterize the silicon interfaces embedded under different types of oxides, specifically Al2O3, Al2O3/Ta2O5, HfO2, SiN, and SiO2. Besides the capability to measure the photovoltage and the minority carrier lifetime, the particularity of this setup is the analysis of these parameters as a function of different illumination wavelengths and the ability to perform in-depth dependent measurements for embedded interface characterization. In this webinar, we present the developed setup for h-KPFM (performed with the HF2LI Lock-in Amplifier) under frequency-modulated and wavelength-dependent illumination. Furthermore, we discuss the influence of different silicon-oxide interfaces on the measured parameters.
Tutorial: M. Alem, Electrical pump-probe with AWG
Here is what you can expect to learn from this tutorial:
- What are the time scales of various time-resolved methods?
- How does electrical pump-probe work in SPM?
- How can you combine fast control of delay and slow detection bandwidth?
- A step-by-step case study: pump-probe KPFM.